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Magnetron sputtered transparent conducting CdO thin films

Author
GURUMURUGAN, K1 ; MANGALARAJ, D1 ; NARAYANDASS, S. K1
[1] Thin Film Laboratory, Department of Physics, Bharathiar University, Coimbatore 641 046, India
Conference title
Advances in indium phosphide, related materials and processing. Part II: Processing and characterization
Conference name
IPRM'95 : International Conference on Indium Phosphide and Related Materials (7 )
Author (monograph)
LORENZO, J (Editor)1 ; ASAHI, H (Editor); WADA, O (Editor); HASEGAWA, H (Editor)
[1] Rome Laboratory, Optoelectronic Components Research, 80 Scott Road, Hanscom AFB, MA 01731, United States
Source

Journal of electronic materials. 1996, Vol 25, Num 4, pp 765-770 ; ref : 27 ref

CODEN
JECMA5
ISSN
0361-5235
Scientific domain
Crystallography; Electronics; Metallurgy, welding; Condensed state physics
Publisher
Institute of Electrical and Electronics Engineers, New York, NY
Publication country
United States
Document type
Conference Paper
Language
English
Keyword (fr)
Atmosphère contrôlée Bande interdite Cadmium oxyde Caractérisation Coefficient absorption Composé binaire Couche mince Croissance cristalline en phase vapeur Densité porteur charge Etude expérimentale Indice réfraction Magnétron Mobilité porteur charge Polycristal Pulvérisation réactive Transmission optique Cd O CdO Composé minéral Métal transition composé
Keyword (en)
Controlled atmospheres Energy gap Cadmium oxides Characterization Absorptance Binary compounds Thin films Crystal growth from vapors Carrier density Experimental study Refractive index Magnetrons Carrier mobility Polycrystals Reactive sputtering Optical transmission Inorganic compounds Transition element compounds
Keyword (es)
Caracterización Coeficiente absorción Transmisión óptica
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70C Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures / 001B70C50 Electronic transport phenomena in thin films and low-dimensional structures / 001B70C50D Low-field transport and mobility; piezoresistance

Pascal
001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation / 001B70H66 Optical properties of specific thin films

Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering

Pacs
7350D Low-field transport and mobility; piezoresistance

Pacs
7866 Optical properties of specific thin films, surfaces, and low-dimensional structures

Pacs
8115C Deposition by sputtering

Discipline
Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
3040431

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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