A super-precision linear slideway with angular correction in three axes
- Author
- MONTEIRO, A. F1 ; SMITH, S. T1 ; CHETWYND, D. G1
[1] Centre of Nanotechnology and Microengineering, Department of Engineering, University of Warwick, Coventry CV4 7AL, United Kingdom - Source
Nanotechnology (Bristol. Print). 1996, Vol 7, Num 1, pp 27-36 ; ref : 8 ref
- ISSN
- 0957-4484
- Scientific domain
- Electronics; Optics; Physics
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Conception Contact glissant Etude expérimentale Glissière Interféromètre Microappareillage Micromètre Mouvement translation Mécanisme entraînement Optimisation Précision élevée Résolution Transducteur piézoélectrique Nanotechnologie
- Keyword (en)
- Design Sliding contact Experimental study Guideway Interferometers Microequipment Micrometer Translation motion Drive mechanism Optimization High precision Resolution Piezoelectric sensor
- Keyword (es)
- Contacto deslizante Corredera Microequipo Micrómetro Movimiento traslación Mecanismo accionamiento Precisión elevada Transductor piezoelectrico
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00F Metrology, measurements and laboratory procedures / 001B00F60 Laboratory procedures / 001B00F60S Positioning and alignment; manipulating, remote handling
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Discipline
- Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 3075193
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0957-4484/7/1/004 
https://dx.doi.org/10.1088/0957-4484/7/1/004
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