Preparation of fluorocarbon multilayers by a chemical adsorption technique
- Author
- SOGA, M1 ; OGAWA, K
[1] Nakao Laboratory, Matsushita Electric Industrial Co., Ltd., 3-1-1 Yagumo-nakamachi, Moriguchi, Osaka 570, Japan - Source
Japanese journal of applied physics. 1996, Vol 35, Num 5A, pp L595-L597 ; 2 ; ref : 5 ref
- CODEN
- JJAPA5
- ISSN
- 0021-4922
- Scientific domain
- Crystallography; Optics; Condensed state physics; Physics; Plasma physics
- Publisher
- Japanese journal of applied physics, Tokyo
- Publication country
- Japan
- Document type
- Article
- Language
- English
- Keyword (fr)
- Adsorption Composé aliphatique saturé Couche mince Couche monomoléculaire Croissance cristalline en solution Etude expérimentale Multicouche Méthode chimique Propriété électrique Silane organique Solution non aqueuse Couche autoassemblée Décane(1,2-bis[trichorosilyl]-3,3,4,4,5,5,6,6,7,7,8,8-dodécafluoro) Chlore Composé organique Composé organique Fluor Composé organique
- Keyword (en)
- Adsorption Saturated aliphatic compound Thin films Monolayers Crystal growth from solutions Experimental study Multilayers Chemical method Electrical properties Organic silane Non aqueous solution Selfassembled layers Chlorine Organic compounds Organic compounds Fluorine Organic compounds
- Keyword (es)
- Compuesto alifático saturado Método químico Silano orgánico Solución no acuosa
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H65 Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy
- Pacs
- 6865 Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties
- Discipline
- Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 3090534
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1143/JJAP.35.L581 
https://dx.doi.org/10.1143/JJAP.35.L581
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