Influence of magnetron sputtering process parameters on wear properties of steel/Cr3Si or Cr/MoSx
- Author
- WEISE, G1 ; TERESIAK, A1 ; BÄCHER, I1 ; MARKSCHLÄGER, P; KAMPSCHULTE, G
[1] Institute for Solid State and Material Research, P.O. Box 270016, 01171 Dresden, Germany - Conference title
- ICMCTF95 International Conference on Metallurgical Coatings and Thin Films
- Conference name
- ICMCTF95 International Conference on Metallurgical Coatings and Thin Films (22 ; San Diego, CA 1995-04-24)
- Author (monograph)
- JEHN, Hermann A (Editor)1 ; MATTHEWS, Allan (Editor); MCGUIRE, Gary E (Editor); PETROV, Ivan (Editor)
American Vacuum Society ; Vacuum Metallurgy and Thin Films Divisions, New York NY, United States (Funder/Sponsor)
[1] Forschungsinstitut für Edelmetalle und Metallcheme, Katharinenstrasse 17, 73525 Schwaebisch Gmünd, Germany - Source
Surface & coatings technology. 1995, Vol 76-77, Num 1-3, pp 382-392 ; 2 ; ref : 24 ref
- CODEN
- SCTEEJ
- ISSN
- 0257-8972
- Scientific domain
- General chemistry, physical chemistry; Metallurgy, welding
- Publisher
- Elsevier, Lausanne
- Publication country
- Switzerland
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Caractérisation Chrome siliciure Couche mince Dépôt physique phase vapeur Epaisseur Etude expérimentale Magnétron Molybdène sulfure Propriété mécanique Pulvérisation irradiation Résistance usure Traitement surface Tribologie Usure
- Keyword (en)
- Characterization Chromium silicides Thin films Physical vapor deposition Thickness Experimental study Magnetrons Molybdenum sulfides Mechanical properties Sputtering Wear resistance Surface treatments Tribology Wear
- Keyword (es)
- Caracterización
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering
- Discipline
- Physics and materials science
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 3093998
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/0257-8972(95)02605-3 
https://dx.doi.org/10.1016/0257-8972(95)02605-3
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