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Modification of mechanical properties of nitrogen-sputtered boron nitride films by ion bombardment

Author
JENSEN, H1 ; JENSEN, U. M1 ; SORENSEN, G1
[1] Institute of physics and Astronomy, Aarhus University, 8000 Aarhus, Denmark
Conference title
International Conference on Plasma Surface Engineering
Conference name
International Conference on Plasma Surface Engineering (4 ; Garmisch-Partenkirchen 1994-09-19)
Author (monograph)
STALS, L. M (Editor)1 ; RIE, K.-T (Editor); SCHRAM, D. C (Editor); WOLF, G. K (Editor)
[1] Institute for Materials Research, Material Physic Division, Limburgs Universitair Centrum, Wetenschapspark, 3590 Diepenbeek, Belgium
Source

Surface & coatings technology. 1995, Vol 74-75, Num 1-3, pp 781-787 ; 2 ; ref : 18 ref

CODEN
SCTEEJ
ISSN
0257-8972
Scientific domain
General chemistry, physical chemistry; Metallurgy, welding
Publisher
Elsevier, Lausanne
Publication country
Switzerland
Document type
Conference Paper
Language
English
Keyword (fr)
Bore nitrure Coefficient frottement Couche mince Cristal cubique Dépôt physique phase vapeur Emission acoustique Etude expérimentale Frottement Irradiation ion Propriété mécanique Pulvérisation irradiation Radiofréquence Structure cristalline Traitement surface Tribologie
Keyword (en)
Boron nitrides Friction factor Thin films Cubic crystals Physical vapor deposition Acoustic emission Experimental study Friction Ion irradiation Mechanical properties Sputtering Radiofrequency Crystal structure Surface treatments Tribology
Keyword (es)
Cristal cúbico Irradiación ión Radiofrequencia
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering

Pacs
8115C Deposition by sputtering

Discipline
Physics and materials science
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
3158302

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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