Modification of mechanical properties of nitrogen-sputtered boron nitride films by ion bombardment
- Author
- JENSEN, H1 ; JENSEN, U. M1 ; SORENSEN, G1
[1] Institute of physics and Astronomy, Aarhus University, 8000 Aarhus, Denmark - Conference title
- International Conference on Plasma Surface Engineering
- Conference name
- International Conference on Plasma Surface Engineering (4 ; Garmisch-Partenkirchen 1994-09-19)
- Author (monograph)
- STALS, L. M (Editor)1 ; RIE, K.-T (Editor); SCHRAM, D. C (Editor); WOLF, G. K (Editor)
[1] Institute for Materials Research, Material Physic Division, Limburgs Universitair Centrum, Wetenschapspark, 3590 Diepenbeek, Belgium - Source
Surface & coatings technology. 1995, Vol 74-75, Num 1-3, pp 781-787 ; 2 ; ref : 18 ref
- CODEN
- SCTEEJ
- ISSN
- 0257-8972
- Scientific domain
- General chemistry, physical chemistry; Metallurgy, welding
- Publisher
- Elsevier, Lausanne
- Publication country
- Switzerland
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Bore nitrure Coefficient frottement Couche mince Cristal cubique Dépôt physique phase vapeur Emission acoustique Etude expérimentale Frottement Irradiation ion Propriété mécanique Pulvérisation irradiation Radiofréquence Structure cristalline Traitement surface Tribologie
- Keyword (en)
- Boron nitrides Friction factor Thin films Cubic crystals Physical vapor deposition Acoustic emission Experimental study Friction Ion irradiation Mechanical properties Sputtering Radiofrequency Crystal structure Surface treatments Tribology
- Keyword (es)
- Cristal cúbico Irradiación ión Radiofrequencia
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering
- Discipline
- Physics and materials science
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 3158302
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/0257-8972(95)08276-X 
https://dx.doi.org/10.1016/0257-8972(95)08276-X
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