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Scanning probe microscopy for testing ultrafast electronic devices

Author
HOU, A. S1 ; NECHAY, B. A1 ; HO, F1 ; BLOOM, D. M1
[1] Edward L. Ginzton Laboratory, Stanford University, Stanford, CA 94305, United States
Issue title
Optical probing of ultrafast devices and integrated circuits
Source

Optical and quantum electronics. 1996, Vol 28, Num 7, pp 819-841 ; ref : 21 ref

CODEN
OQELDI
ISSN
0306-8919
Scientific domain
Electronics; Optics; Telecommunications
Publisher
Springer, Dordrecht
Publication country
Netherlands
Document type
Article
Language
English
Keyword (fr)
Circuit intégré Grande vitesse Microscopie champ proche Méthode essai Méthode mesure Performance Sondage optique
Keyword (en)
Integrated circuits High speed Scanning probe microscopy Test method Measuring methods Performance Optical sounding
Keyword (es)
Gran velocidad Método ensayo Sondeo óptico
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G79 Scanning probe microscopes, components and techniques

Discipline
Metrology
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
3161570

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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