Alternatively matched r.f.-PECVD system for diamond synthesis
- Author
- CHOI, Y1 ; LEE, H. W1 ; SONG, J. S; SONG, Y. S
[1] Group 1, HanWha Group Research & Engineering Center, 6 Shinsung-Dong, Yusung-Ku, Taejon 305-345, Korea, Republic of - Source
Materials science & engineering. B, Solid-state materials for advanced technology. 1996, Vol 39, Num 3, pp L10-L13 ; ref : 20 ref
- ISSN
- 0921-5107
- Scientific domain
- Chemical industry parachemical industry; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Keyword (fr)
- Condition opératoire Couche mince Diamant synthétique Diamant Etude expérimentale Méthode CVD Procédé dépôt SEM Spectrométrie Raman Structure diamant
- Keyword (en)
- Operating conditions Thin films Synthetic diamond Diamonds Experimental study CVD Deposition process SEM Raman spectroscopy Diamond structure
- Keyword (es)
- Condición operatoria Diamante sintético Procedimiento revestimiento Estructura diamante
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15G Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)
- Discipline
- Physics and materials science
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 3169409
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/0921-5107(96)01591-7 
https://dx.doi.org/10.1016/0921-5107(96)01591-7
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