Properties of TiO2 films prepared by ion-assisted deposition using a gridless end-Hall ion source
- Author
- GILO, M1 ; CROITORU, N2
[1] ELOP Electrooptics Ind., P.O. Box 1165, Rehovot 7611, Israel
[2] Tel-Aviv University, Tel Aviv, Israel - Source
Thin solid films. 1996, Vol 283, Num 1-2, pp 84-89 ; ref : 14 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Article
- Language
- English
- Keyword (fr)
- Atmosphère contrôlée Atmosphère humide Composé binaire Contrainte Couche mince Dépôt Etude expérimentale Evaporation bombardement électronique Faisceau ion Indice réfraction Microstructure Rugosité Substrat Surface Titane oxyde Méthode IBAD O Ti TiO2 Composé minéral Métal transition composé
- Keyword (en)
- Controlled atmospheres Wet atmosphere Binary compounds Stresses Thin films Deposition Experimental study Electron bombardment evaporation Ion beams Refractive index Microstructure Roughness Substrates Surfaces Titanium oxides IBAD Inorganic compounds Transition element compounds
- Keyword (es)
- Atmósfera humeda Evaporación bombardeo electrónico
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H60 Physical properties of thin films, nonelectronic / 001B60H60B Mechanical and acoustical properties
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation / 001B70H20 Optical properties of bulk materials and thin films / 001B70H20C Optical constants: refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy
- Pacs
- 7820C Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity)
- Discipline
- Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 3239495
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/0040-6090(95)08500-9 
https://dx.doi.org/10.1016/0040-6090(95)08500-9
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