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The application of advanced techniques for complex focused-ion-beam device modification

Author
ABRAMO, M. T1 ; HAHN, L. L1
[1] IBM Microelectronics Division, 1000 River Road, Essex Junction, Vermont 05452, United States
Conference title
Reliability of electron devices, failure physics and analysis
Conference name
ESREF'96 European Symposium on Reliability of Electron Devices, Failure Physics and Analysis (7 ; Enschede 1996-10-08)
Author (monograph)
GROESENEKEN, Guido (Editor)1 ; MAES, Herman E (Editor)1 ; MOUTHAAN, Anton J (Editor)2 ; VERWEIJ, Jan F (Editor)2
IMEC, Leuven, Belgium (Funder/Sponsor)
University of Twente ; MESA Research Institute, Enschede, Netherlands (Funder/Sponsor)
[1] IMEC, Leuven, Belgium
[2] MESA Institute of the University of Twente, Enschede, Netherlands
Source

Microelectronics and reliability. 1996, Vol 36, Num 11-12, pp 1775-1778 ; ref : 4 ref

CODEN
MCRLAS
ISSN
0026-2714
Scientific domain
Electronics
Publisher
Elsevier, Oxford
Publication country
United Kingdom
Document type
Conference Paper
Language
English
Keyword (fr)
Aluminium Circuit intégré Dépôt bombardement ionique Fiabilité Micrographie Méthode mesure Silicium SiO2
Keyword (en)
Aluminium Integrated circuit Ion beam coating Reliability Micrography Measurement method Silicon
Keyword (es)
Aluminio Circuito integrado Revestimiento bombardeo iónico Fiabilidad Micrografía Método medida Silicio
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03B Testing, measurement, noise and reliability

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
3242100

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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