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Preparation of Ti-Al-N electrode films by pulsed laser ablation for lead-zirconate-titanate film capacitors

Author
MORIMOTO, A1 ; YAMANAKA, Y1 ; SHIMIZU, T1
[1] Department of Electrical and Computer Engineering, Faculty of Engineering, Kanazawa University, Kanazawa 920, Japan
Source

Japanese journal of applied physics. 1996, Vol 35, Num 2B, pp L227-L230 ; 2 ; ref : 20 ref

CODEN
JJAPA5
ISSN
0021-4922
Scientific domain
Crystallography; Optics; Condensed state physics; Physics; Plasma physics
Publisher
Japanese journal of applied physics, Tokyo
Publication country
Japan
Document type
Article
Language
English
Keyword (fr)
Aluminium Nitrure Condensateur couche mince Electrode Etude expérimentale Fabrication microélectronique Ferroélectrique Laser pulsé Titane Nitrure Ablation laser
Keyword (en)
Aluminium Nitrides Thin film capacitor Electrodes Experimental study Microelectronic fabrication Ferroelectric materials Pulsed laser Titanium Nitrides
Keyword (es)
Aluminio Nitruro Condensador capa fina Electrodo Estudio experimental Fabricación microeléctrica Material ferroeléctrico Láser pulsado Titanio Nitruro
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
3259392

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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