Preparation of lead zirconate titanate thin films by reactive magnetron co-sputtering
- Author
- YAMAKAWA, K1 ; TROLIER-MCKINSTRY, S1 ; DOUTHERTY, J. P1
[1] Center for Dielectric Studies, Intercollege Materials Research Laboratory, The Pennsylvania State University, University Park, PA 16802, United States - Source
Materials letters (General ed.). 1996, Vol 28, Num 4-6, pp 317-322 ; ref : 12 ref
- CODEN
- MLETDJ
- ISSN
- 0167-577X
- Scientific domain
- Crystallography; Chemical industry parachemical industry; Condensed state physics; Polymers, paint and wood industries
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Keyword (fr)
- Composition chimique Composé quaternaire Couche mince Cristallisation Etat amorphe Etude expérimentale Hystérésis Magnétron Non stoechiométrie Orientation cristalline Orientation préférentielle PZT Plomb titanate Plomb zirconate Propriété ferroélectrique Préparation chimique Pulvérisation réactive Recuit thermique rapide Solution solide O Pb Ti Zr PbZrxTi1-xO3 Composé minéral
- Keyword (en)
- Chemical composition Quaternary compounds Thin films Crystallization Amorphous state Experimental study Hysteresis Magnetrons Nonstoichiometry Crystal orientation Preferred orientation PZT Lead titanates Lead zirconates Ferroelectric properties Chemical preparation Reactive sputtering Rapid thermal annealing Solid solutions Inorganic compounds
- Keyword (es)
- Orientación preferencial Propiedad ferroeléctrica Recocido térmico rápido
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering
- Discipline
- Physics and materials science
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 3259560
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/0167-577X(96)00081-X 
https://dx.doi.org/10.1016/0167-577X(96)00081-X
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