UHVCVD growth of Si/SiGe heterostructures and their applications
- Autor
- MEYERSON, B. S; ISMAIL, K. E; HARAME, D. L; LEGOUES, F. K; STORK, J. M. C
IBM res. div., T J Watson res. cent., Yorktown Heights NY 10598, United States - Titulo de la conferencia
- Interaction and scattering phenomena in nanostructures
- Nombre de la conferencia
- Winterschool on new developments in solid state physics (8 ; Mauterndorf 1994-02-14)
- Fuente
Semiconductor science and technology. 1994, Vol 9, Num 11S, pp 2005-2010 ; ref : 20 ref
- CODEN
- SSTEET
- ISSN
- 0268-1242
- Campo Científico
- Electronics; Optics; Condensed state physics
- Editor
- Institute of Physics, Bristol
- País de la publicación
- United Kingdom
- Tipo de documento
- Conference Paper
- Idioma
- English
- Palabra clave (fr)
- Article synthèse Circuit intégré Convertisseur NA Dépôt chimique phase vapeur Equipement Fabrication microélectronique Germanium Siliciure Hétérojonction Silicium Transistor hétérojonction Ultravide Transistor bipolaire
- Palabra clave (in)
- Review Integrated circuit DA converter Chemical vapor deposition Equipment Microelectronic fabrication Germanium Silicides Heterojunction Silicon Heterojunction transistor Ultrahigh vacuum Bipolar transistor
- Palabra clave (es)
- Artículo síntesis Circuito integrado Convertidor NA Depósito químico fase vapor Equipo Fabricación microeléctrica Germanio Siliciuro Heterounión Silicio Transistor heterounión Ultravacío
- Clasificación
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F01 Interfaces
- Disciplina
- Electronics
- Procedencia
- Inist-CNRS
- Base de datos
- PASCAL
- Identificador INIST
- 3313198
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0268-1242/9/11S/025 
https://dx.doi.org/10.1088/0268-1242/9/11S/025
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