Morphology of Al-Ni-Ge ohmic contacts to n-GaAs as a function of contact composition
- Author
- LIN, X. W1 ; LAMPERT, W. V; SWIDER, W1 ; HAAS, T. W; HOLLOWAY, P. H; WASHBURN, J1 ; LILIENTAL-WEBER, Z1
[1] Univ. California, materials sci. div., Lawrence Berkeley lab., Berkeley CA 94720f, United States - Conference title
- International conference on metallurgical coatings and thin films
- Conference name
- International conference on metallurgical coatings and thin films (21 ; San Diego CA 1994-04-25)
- Author (monograph)
- SARTWELL, B. D (Editor); MCGUIRE, G. E (Editor)1 ; JEHN, Hermann A (Editor)
[1] Cent. microelectronics, MCNC, Research Triangle Park NC 27709, United States - Source
Thin solid films. 1994, Vol 253, Num 1-2, pp 490-495 ; ref : 18 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Aluminium Contact ohmique Couche superficielle Dépôt Epaisseur Gallium arséniure Germanium Interface Morphologie Métallisation Nickel Précipité SEM Surface TEM
- Keyword (en)
- Aluminium Ohmic contacts Surface layers Deposition Thickness Gallium arsenides Germanium Interfaces Morphology Metallization Nickel Precipitates SEM Surfaces TEM
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H65 Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties
- Pacs
- 6865 Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties
- Discipline
- Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 3343645
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/0040-6090(94)90372-7 
https://dx.doi.org/10.1016/0040-6090(94)90372-7
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