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The HELIOS series of advanced, synchroton based, X-ray sources

Author
KEMPSON, V. C; JORDEN, A. R; CROSLAND, N. C. E; WILSON, M. N; SCHOUTEN, J. C; TOWNSEND, M. C; ANDERSON, R. J
Oxford Instruments, accelerator technology group, Oxford OX2 0DX, United Kingdom
Conference title
Nanometer-scale methods in X-ray technology. European industrial workshop
Conference name
Nanometer-scale methods in X-ray technology. European industrial workshop (1 ; Veldhoven 1993-10-11)
Source

Journal de physique. III (Print). 1994, Vol 4, Num 9, pp 1679-1686 ; ref : 6 ref

ISSN
1155-4320
Scientific domain
Mechanics acoustics; Condensed state physics; Plasma physics
Publisher
Editions de physique, Les Ulis
Publication country
France
Document type
Conference Paper
Language
English
Keyword (fr)
Anneau stockage Application Etude expérimentale Lithographie Rayon X Rayonnement synchrotron Source RX
Keyword (en)
Storage rings Application Experimental study Lithography X radiation Synchrotron radiation X-ray sources
Keyword (es)
Aplicación
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G85 X- and γ-ray instruments and techniques / 001B00G85F X- and γ-ray sources, mirrors, gratings and detectors

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)

Pacs
0785F X- and γ-ray sources, mirrors, gratings, and detectors

Pacs
8540H Lithography, masks and pattern transfer

Discipline
Electronics Metrology
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
3344094

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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