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Monotoring of gas-phase species in metalorganic vapor phase epitaxy by fiber-optics based Fournier transform infrared spectroscopy

Author
SALIM, S; JENSEN, K. F; DRIVER, R. D
MIT, dep. chemical eng., Cambridge MA 02139, United States
Conference title
Metalorganic vapor phase epitaxy 1994
Conference name
ICMOVPE-VII. International conference (7 ; Yokohama 1994-05-31)
Author (monograph)
MINAGAWA, SHIGEKAZU (Editor); HORIKOSHI, YOSHIJI (Editor)1
Japan Society of Applied Physics, Tokyo, Japan (Funder/Sponsor)
Foundation for Advancement of International science (Funder/Sponsor)
[1] NTT Basic Research Laboratories, Kanagawa 243-01, Japan
Source

Journal of crystal growth. 1994, Vol 145, Num 1-4, pp 28-35 ; ref : 11 ref

CODEN
JCRGAE
ISSN
0022-0248
Scientific domain
Crystallography; Geology; Metallurgy, welding
Publisher
Elsevier, Amsterdam
Publication country
Netherlands
Document type
Conference Paper
Language
English
Keyword (fr)
Commande processus Croissance cristalline en phase vapeur Etude expérimentale Fibre optique In situ Matériau semiconducteur Précurseur Semiconducteur III-V Spectre IR Transformation Fourier VPE Composé minéral Composé organométallique
Keyword (en)
Process control Crystal growth from vapors Experimental study Optical fibers In situ Semiconductor materials Precursor III-V semiconductors Infrared spectra Fourier transformation VPE Inorganic compounds Organometallic compounds
Keyword (es)
In situ
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15K Vapor phase epitaxy; growth from vapor phase

Discipline
Physics and materials science
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
3403030

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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