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MOCVD growth on AlGaAs substrates

Author
KOHAMA, Y; OHISO, Y; TATENO, K; AMANO, C; KUROKAWA, T
NTT Opto-Electronics Laboratories, Atsugi-shi Kanagawa 243-01, Japan
Conference title
Metalorganic vapor phase epitaxy 1994
Conference name
ICMOVPE-VII. International conference (7 ; Yokohama 1994-05-31)
Author (monograph)
MINAGAWA, SHIGEKAZU (Editor); HORIKOSHI, YOSHIJI (Editor)1
Japan Society of Applied Physics, Tokyo, Japan (Funder/Sponsor)
Foundation for Advancement of International science (Funder/Sponsor)
[1] NTT Basic Research Laboratories, Kanagawa 243-01, Japan
Source

Journal of crystal growth. 1994, Vol 145, Num 1-4, pp 970-971 ; ref : 2 ref

CODEN
JCRGAE
ISSN
0022-0248
Scientific domain
Crystallography; Geology; Metallurgy, welding
Publisher
Elsevier, Amsterdam
Publication country
Netherlands
Document type
Conference Paper
Language
English
Keyword (fr)
Aluminium arséniure CVD Composé ternaire Croissance cristalline en phase vapeur Croissance film Etude expérimentale Gallium arséniure Hétérojonction Matériau semiconducteur Phototransistor Substrat Al As Ga AlGaAs Substrat AlGaAs Composé minéral Composé organométallique
Keyword (en)
Aluminium arsenides CVD Ternary compounds Crystal growth from vapors Film growth Experimental study Gallium arsenides Heterojunctions Semiconductor materials Phototransistors Substrates Inorganic compounds Organometallic compounds
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H65 Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties

Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15G Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)

Pacs
6865 Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties

Pacs
8115G Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, etc.)

Discipline
Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
3405920

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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