Efficiency enhancement of diffractive optical elements by variable relief profiling
- Author
- STEMMER, A; ZARSCHIZKY, H; KNAPEK, E; LEFRANC, G; MAYERHOFER, F
Siemens Corporate Research and Development, 81730 München, Germany - Conference title
- Micro- and nanoengineering 94
- Conference name
- MNE'94 : international conference on micro- and nanofabrication (Davos 1994-09-26)
- Author (monograph)
- LEHMANN, H. W (Editor)1 ; STAUFER, U (Editor); VETTINGER, P (Editor)
[1] Paul Scherrer inst., Zürich, Switzerland - Source
Microelectronic engineering. 1995, Vol 27, Num 1-4, pp 171-174 ; ref : 6 ref
- CODEN
- MIENEF
- ISSN
- 0167-9317
- Scientific domain
- Electronics
- Publisher
- Elsevier Science, Amsterdam
- Publication country
- Netherlands
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Composant optique Conception circuit Coupe transversale Efficacité diffraction Etude théorique Fabrication microélectronique Formation motif Gravure ionique réactive Lithographie faisceau électron Masquage Organigramme Ouverture numérique Procédé fabrication Procédé voie sèche Profilage Resist Rugosité Réseau diffraction Vérification expérimentale
- Keyword (en)
- Optical component Circuit design Cross section Diffraction efficiency Theoretical study Microelectronic fabrication Patterning Reactive ion etching Electron beam lithography Masking Flowchart Numerical aperture Manufacturing process Dry process Cold roll forming Resist Roughness Diffraction grating Experimental test
- Keyword (es)
- Componente óptico Concepción circuito Corte transverso Eficacia difracción Estudio teórico Fabricación microeléctrica Formacíon motivo Grabado iónico reactivo Litografía haz electrón Enmascaramiento Organigrama Abertura numérica Procedimiento fabricación Procedimiento vía seca Perfilación Resistencia Rugosidad Rejilla difracción Verificación experimental
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02C Optical and optoelectronic circuits / 001D03G02C4 Miscellaneous
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 3466196
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/0167-9317(94)00082-6 
https://dx.doi.org/10.1016/0167-9317(94)00082-6
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