Modification effect of a-Si1-xNx:H surface by hydrogen radicals
- Author
- YAMAGUCHI, M1 ; NAGAYOSHI, H1 ; IKEDA, M1 ; YAMAMOTO, Y1 ; KAMISAKO, K1 ; TARUI, Y
[1] Tokyo univ. agriculture & technology, fac. technology, div. electronic information eng., Koganei Tokyo 184, Japan - Conference title
- Solid state devices and materials
- Conference name
- SSDM'94. International conference (Yokohama, Kanagawa 1994-08-23)
- Author (monograph)
- TARUCHA, SEIGO (Editor); ARAKAWA, YASUHIKO (Editor); SHIRAKI, YASUHIRO (Editor); SUSAKI, WATARU (Editor); YOSHIMI, MAKOTO (Editor); FUKUMA, MASAO (Editor); FURUYA, KAZUHITO (Editor); HORIKOSHI, YOSHIJI (Editor); IMAI, HAJIME (Editor); ISHIWARA, HIROSHI (Editor); KARAYAMA, YOSHIFUMI (Editor); MIYAO, MASANOBU (Editor); NAKASHIMA, HISAO (Editor)
Japan Society of Applied Physics, Tokyo, Japan (Funder/Sponsor) - Source
Japanese journal of applied physics. 1995, Vol 34, Num 2B, pp 791-795 ; 1 ; ref : 10 ref
- CODEN
- JJAPA5
- ISSN
- 0021-4922
- Scientific domain
- Crystallography; Optics; Condensed state physics; Physics; Plasma physics
- Publisher
- Japanese journal of applied physics, Tokyo
- Publication country
- Japan
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Addition hydrogène Composé binaire Couche mince Dépôt Etat amorphe Etude expérimentale Gravure sélective Hydrogène Hyperfréquence Mode liaison Multicouche Postluminescence Radical libre minéral Réaction surface Silicium nitrure Traitement surface Couche ultramince N Si a-Si1-xNx:H Composé minéral
- Keyword (en)
- Hydrogen additions Binary compounds Thin films Deposition Amorphous state Experimental study Selective etching Hydrogen Microwave radiation Binding mode Multilayers Afterglow Inorganic free radical Surface reactions Silicon nitrides Surface treatments Ultrathin films Inorganic compounds
- Keyword (es)
- Grabado selectivo Modo de enlace Radical libre inorgánico
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H35 Solid surfaces and solid-solid interfaces / 001B60H35B Surface structure and topography
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H65 Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A65 Surface treatments
- Pacs
- 6865 Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties
- Discipline
- Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 3471274
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1143/JJAP.34.791 
https://dx.doi.org/10.1143/JJAP.34.791
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