In-situ determination of photoresist glass transition temperature by wafer curvature measurement techniques
- Author
- SCHILTZ, A; PANIEZ, P. J
CNET-CNS, France Telecom, 38240 Meylan, France - Conference title
- Micro- and nanoengineering 94
- Conference name
- MNE'94 : international conference on micro- and nanofabrication (Davos 1994-09-26)
- Author (monograph)
- LEHMANN, H. W (Editor)1 ; STAUFER, U (Editor); VETTINGER, P (Editor)
[1] Paul Scherrer inst., Zürich, Switzerland - Source
Microelectronic engineering. 1995, Vol 27, Num 1-4, pp 413-416 ; ref : 8 ref
- CODEN
- MIENEF
- ISSN
- 0167-9317
- Scientific domain
- Electronics
- Publisher
- Elsevier Science, Amsterdam
- Publication country
- Netherlands
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Analyse contrainte Analyse thermique Commande processus Contrôle fabrication Courbure Détermination Etude expérimentale Fabrication microélectronique Lithographie Méthode mesure Méthode non destructive Pastille électronique Photorésist Polymère vitreux Processus fabrication Température transition vitreuse Schéma bloc
- Keyword (en)
- Stress analysis Thermal analysis Process control Processing control Curvature Determination Experimental study Microelectronic fabrication Lithography Measurement method Non destructive method Wafer Photoresist Glassy polymer Production process Glass transition temperature Function block diagram
- Keyword (es)
- Análisis tensión Análisis térmico Control proceso Control fabricación Curvatura Determinación Estudio experimental Fabricación microeléctrica Litografía Método medida Método no destructivo Pastilla electrónica Fotorresistente Polímero vitroso Proceso fabricación Temperatura transición vítrosa
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 3472466
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/0167-9317(94)00136-I 
https://dx.doi.org/10.1016/0167-9317(94)00136-I
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