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Modelling of a micromachined torque sensor

Author
ROMBACH, P; LANGHEINRICH, W
Technical univ. Darmstadt, solid state electronics lab., Darmstadt, Germany
Conference title
Eurosensors. Conference
Conference name
Eurosensors. Conference (8 ; Toulouse 1994-09-25)
Author (monograph)
BLASQUEZ, G (Editor); PONS, P (Editor)
Source

Sensors and actuators. A, Physical. 1995, Vol 46, Num 1-3, pp 294-297 ; ref : 12 ref

ISSN
0924-4247
Scientific domain
Physics
Publisher
Elsevier Science, Lausanne
Publication country
Switzerland
Document type
Conference Paper
Language
English
Keyword (fr)
Appareillage Capteur Champ magnétique Circuit magnétique Couple Mesure sans contact Microstructure Modélisation Méthode mesure Optimisation Schéma équivalent Technologie MOS complémentaire Transistor effet champ Usinage
Keyword (en)
Instrumentation Sensors Magnetic fields Magnetic circuits Torque Non contact measurement Microstructure Modeling Measuring methods Optimization Equivalent circuits Complementary MOS technology Field effect transistors Machining
Keyword (es)
Medida sin contacto Modelización Tecnología MOS complementario
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10P Instruments for strain, force and torque

Pacs
0710P Instruments for strain, force, and torque

Discipline
Metrology
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
3541881

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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