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Development of chemical beam epitaxy for the deposition of gallium nitride

Author
KINGSLEY, C. R1 ; WHITAKER, T. J1 ; WEE, A. T. S; JACKMAN, R. B; FOORD, J. S1
[1] Univ. Oxford, physical chemical lab., Oxford OX1 3QZ, United Kingdom
Conference title
High temperature electronics : materials, devices and applications
Conference name
EMRS 1994 spring meeting. Symposium E (Strasbourg 1994-05-24)
Author (monograph)
FRICKE, K (Editor)1 ; KROZER, V (Editor)
European Materials Research Society, International (Funder/Sponsor)
[1] Tech. Hochschule Darmstadt ; Inst. Hochfrequenztech., 64283 Darmstadt, Germany
Source

Materials science & engineering. B, Solid-state materials for advanced technology. 1995, Vol 29, Num 1-3, pp 78-82 ; ref : 22 ref

ISSN
0921-5107
Scientific domain
Chemical industry parachemical industry; Metallurgy, welding; Condensed state physics
Publisher
Elsevier, Amsterdam
Publication country
Netherlands
Document type
Conference Paper
Language
English
Keyword (fr)
Barrière Schottky CVD Composé III-V Couche mince Couche épitaxique Dispositif semiconducteur Epitaxie Etude expérimentale Gallium nitrure Mesure électrique Nitrure Spectrométrie photoélectron XRD
Keyword (en)
Schottky barrier CVD III-V compound Thin films Epitaxial layers Semiconductor devices Epitaxy Experimental study Gallium nitrides Electrical measurement Nitrides Photoelectron spectroscopy XRD
Keyword (es)
Barrera Schottky Compuesto III-V Medida eléctrica
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15K Vapor phase epitaxy; growth from vapor phase

Discipline
Physics and materials science
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
3553437

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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