In-sit X-ray studies of organometallic vapor phase epitaxy growth
- Author
- FUOSS, P. H1 ; KISKER, D. W; STEPHENSON, G. B; BRENNAN, S
[1] AT & T Bell Laboratories, Murray Hill NY 07974, United States - Conference title
- Workshop on critical issues in epitaxy
- Conference name
- Workshop on critical issues in epitaxy (Boulder CO 1994-06-22)
- Author (monograph)
- MAHAJAN, S (Editor)1 ; TEMKIN, H (Editor)
[1] Carnegie Mellon univ. ; dep. materials sci. eng., Pittsburgh PA 15213, United States - Source
Materials science & engineering. B, Solid-state materials for advanced technology. 1995, Vol 30, Num 2-3, pp 99-108 ; ref : 19 ref
- ISSN
- 0921-5107
- Scientific domain
- Chemical industry parachemical industry; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- CVD Composé organométallique Couche mince Couche épitaxique Diffusion RX Epitaxie Etude expérimentale Fluorescence Réacteur épitaxial Spectrométrie RX
- Keyword (en)
- CVD Organometallic compounds Thin films Epitaxial layers X ray scattering Epitaxy Experimental study Fluorescence Epitaxial reactor X-ray spectroscopy
- Keyword (es)
- Difusión rayo X Reactor epitaxial
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15K Vapor phase epitaxy; growth from vapor phase
- Discipline
- Physics and materials science
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 3553658
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/0921-5107(94)09004-1 
https://dx.doi.org/10.1016/0921-5107(94)09004-1
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