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Inducement of GaAs growth by electron beam irradiation on GaAs covered by native oxide

Author
WATANABE, K1 ; HOSOYA, M; HARA, K1 ; YOSHINO, J1 ; MUNEKATA, H1 ; KUKIMOTO, H1
[1] Tokyo inst. technology, imaging sci. eng. lab., Midori-ku, Yokohama 226, Japan
Conference title
Molecular beam epitaxy 1994. I
Conference name
MBE-VIII. International conference (8 ; Osaka 1994-08-29)
Author (monograph)
HIYAMIZU, S (Editor)1 ; SHIRAKI, Y (Editor); GONDA, S (Editor)1
Japan Society of Applied Physics, Tokyo, Japan (Funder/Sponsor)
Electrochemical Society of Japan, Tokyo, Japan (Funder/Sponsor)
Institute of Electrical Engineers of Japan, Tokyo, Japan (Funder/Sponsor)
Institute of Electronics, Information and Communication Engineers, Japan (Funder/Sponsor)
Japanese Association of Crystal Growth, Japan (Funder/Sponsor)
Physical Society of Japan, Tokyo, Japan (Funder/Sponsor)
Surface Science Society of Japan, Japan (Funder/Sponsor)
Vacuum Society of Japan, Japan (Funder/Sponsor)
[1] Osaka univ., Japan
Source

Journal of crystal growth. 1995, Vol 150, Num 1-4, pp 612-615 ; 1 ; ref : 9 ref

CODEN
JCRGAE
ISSN
0022-0248
Scientific domain
Crystallography; Geology; Metallurgy, welding
Publisher
Elsevier, Amsterdam
Publication country
Netherlands
Document type
Conference Paper
Language
English
Keyword (fr)
Composé binaire Croissance cristalline en phase vapeur Effet physique rayonnement Etat natif Etude expérimentale Faisceau électron Gallium arséniure Matériau semiconducteur Microstructure Mode opératoire Mécanisme croissance Oxyde Prétraitement Substrat Aire sélective As Ga GaAs Composé minéral
Keyword (en)
Binary compounds Crystal growth from vapors Physical radiation effects Native state Experimental study Electron beams Gallium arsenides Semiconductor materials Microstructure Operating mode Growth mechanism Oxides Pretreatment Substrates Selective area Inorganic compounds
Keyword (es)
Estado nativo Método operatorio Mecanismo crecimiento Pretratamiento
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography / 001B60A80 Physical radiation effects, radiation damage / 001B60A80F Electrons and positron radiation effects

Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy

Pacs
6180F Electrons and positron radiation effects

Discipline
Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
3575467

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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