Magnetron sputter deposition of A-15 and BCC crystal structure tungsten thin films
- Author
- O'KEEFE, M. J1 ; GRANT, J. T; SOLOMON, J. S
[1] Wright lab. solid state elecronics directorate, Wright-Patterson AFB OH 45433-7319, United States - Conference name
- Defect structure, morphology and properties of deposits. Symposium (Rosemont IL 1994-10-04)
- Source
Journal of electronic materials. 1995, Vol 24, Num 8, pp 961-967 ; ref : 22 ref
- CODEN
- JECMA5
- ISSN
- 0361-5235
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Composé A15 Conductivité électrique Couche mince Croissance cristalline en phase vapeur Etude expérimentale Magnétron Pulvérisation haute fréquence Relation fabrication propriété Réseau cubique centré Structure cristalline Tungstène W Métal transition
- Keyword (en)
- A-15 compounds Electric conductivity Thin films Crystal growth from vapors Experimental study Magnetrons Radiofrequency sputtering Fabrication property relation BCC lattices Crystal structure Tungsten Transition elements
- Keyword (es)
- Pulverización alta frecuencia Relación fabricación propiedad
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55J Structure and morphology; thickness
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70C Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures / 001B70C61 Electrical properties of specific thin films / 001B70C61A Metals and metallic alloys
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering
- Discipline
- Metals. Metallurgy Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 3615131
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1007/BF02652968 
https://dx.doi.org/10.1007/BF02652968
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