Chemical processes in the chemical mechanical polishing of copper
- Author
- STEIGERWALD, J. M; MURARKA, S. P; GUTMANN, R. J; DUQUETTE, D. J
Rensselaer polytech. inst., cent. integrated electronics, Troy NY 12180, United States - Issue title
- Copper metallization for future VLSI
- Author (monograph)
- MURARKA, Shyam P (Editor)1 ; GUTMANN, Ronald J (Editor)1
[1] Rensselaer polytech. inst. ; cent. integrated electronics, Troy NY 12180, United States - Source
Materials chemistry and physics. 1995, Vol 41, Num 3, pp 217-228 ; ref : 27 ref
- CODEN
- MCHPDR
- ISSN
- 0254-0584
- Scientific domain
- Chemistry; Metallurgy, welding; Physics
- Publisher
- Elsevier, Lausanne
- Publication country
- Switzerland
- Document type
- Article
- Language
- English
- Keyword (fr)
- Abrasion Cuivre Etude expérimentale Fabrication microélectronique Métallisation Polissage chimique Polissage mécanique Polissage Traitement surface
- Keyword (en)
- Abrasion Copper Experimental study Microelectronic fabrication Metallizing Chemical polishing Mechanical polishing Polishing Surface treatment
- Keyword (es)
- Abrasión Cobre Estudio experimental Fabricación microeléctrica Metalización Pulido químico Pulido mecánico Pulimiento Tratamiento superficie
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 3671894
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/0254-0584(95)01516-7 
https://dx.doi.org/10.1016/0254-0584(95)01516-7
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