Strain evaluation at Si/SiO2 interface using the electroreflectance method
- Author
- MORIFUJI, M1 ; YONGWATTANASOONTORN, P1 ; TANIGUCHI, K1 ; HAMAGUCHI, C1 ; OZAWA, Y
[1] Osaka univ., fac. eng., dep. electronics, Suita, Osaka 565, Japan - Source
Japanese journal of applied physics. 1993, Vol 32, Num 6A, pp 2735-2739 ; 1 ; ref : 24 ref
- CODEN
- JJAPA5
- ISSN
- 0021-4922
- Scientific domain
- Crystallography; Optics; Condensed state physics; Physics; Plasma physics
- Publisher
- Japanese journal of applied physics, Tokyo
- Publication country
- Japan
- Document type
- Article
- Language
- English
- Keyword (fr)
- Déformation mécanique Electroréflectance Etude expérimentale Interface solide solide Matériau semiconducteur Méthode pseudopotentiel Silicium oxyde Silicium Transition optique Composé minéral
- Keyword (en)
- Strains Electroreflectance Experimental study Solid-solid interfaces Semiconductor materials Pseudopotential method Silicon oxides Silicon Optical transition Inorganic compounds
- Keyword (es)
- Método seudopotencial Transición óptica
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60B Mechanical and acoustical properties of condensed matter / 001B60B20 Mechanical properties of solids / 001B60B20F Deformation and plasticity (including yield, ductility, and superplasticity)
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H65 Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation / 001B70H66 Optical properties of specific thin films
- Pacs
- 6865 Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties
- Discipline
- Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 3753723
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1143/JJAP.32.2735 
https://dx.doi.org/10.1143/JJAP.32.2735
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