Evaluation of amorphous (Mo, Ta, W)-Si-N diffusion barriers for <Si>|Cu metallizations
- Author
- REID, J. S1 ; KOLAWA, E1 ; RUIZ, R. P; NICOLET, M.-A1
[1] California inst. technology, Pasadena CA 91125, United States - Conference title
- International conference on metallurgical coatings and thin films
- Conference name
- International conference on metallurgical coatings and thin films (20 ; San Diego CA 1993-04-19)
- Author (monograph)
- MCGUIRE, GARY E (Editor)1 ; MATTHEWS, ALLAN (Editor); JEHN, HERMANN A (Editor)
[1] MCNC, cent. microelectrics systems technologies, Research Triangle Park NC 27709-2889, United States - Source
Thin solid films. 1993, Vol 236, Num 1-2, pp 319-324 ; ref : 19 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Alliage amorphe Azote Barrière diffusion Caractéristique courant tension Cristallisation Cuivre Diffusion joint grain Etude expérimentale Fabrication microélectronique Modèle thermodynamique Molybdène alliage Métallisation Pulvérisation cathodique Recuit Silicium alliage Silicium Tantale alliage Tungstène alliage
- Keyword (en)
- Amorphous alloy Nitrogen Diffusion barriers Voltage current curve Crystallization Copper Grain boundary diffusion Experimental study Microelectronic fabrication Thermodynamic model Molybdenum alloy Metallizing Cathodic sputtering Annealing Silicon alloy Silicon Tantalum alloy Tungsten alloy
- Keyword (es)
- Aleación amorfa Nitrógeno Característica corriente tensión Cristalización Cobre Difusión límite grano Estudio experimental Fabricación microeléctrica Modelo termodinámico Molibdeno aleación Metalización Pulverización catódica Recocido Silicio aleación Silicio Tantalio aleación Wolframio aleación
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 3952542
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/0040-6090(93)90689-M 
https://dx.doi.org/10.1016/0040-6090(93)90689-M
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