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Interaction of atomic hydrogen with GaAs (001) surface oxide : volatile Ga-oxide formation

Author
YAMADA, M; IDE, Y; TONE, K
Optoelectronics technology res. lab., Tsukuba, Ibaraki 300-26, Japan
Conference title
Applications of surface science and electronic materials
Conference name
ICV-12 : international vacuum congress (12 ; The Hague 1992-10-12)
Author (monograph)
GRASSERBAUER, M (Editor); VAN GORKUM, A. A (Editor); LÜTH, H (Editor); ZALM, P. C (Editor); KLEYN, A. W (Editor)1
Netherland Vacuum Society, Netherlands (Funder/Sponsor)
International Union for Vacuum Science Technique and Applications, International (Funder/Sponsor)
[1] FOM-Inst. atomic molecular physics, Amsterdam, Netherlands
Source

Applied surface science. 1993, Vol 70-71, Num 1-4, pp 531-535 ; B ; ref : 10 ref

ISSN
0169-4332
Scientific domain
General chemistry, physical chemistry; Crystallography; Nanotechnologies, nanostructures, nanoobjects; Condensed state physics
Publisher
Elsevier Science, Amsterdam
Publication country
Netherlands
Document type
Conference Paper
Language
English
Keyword (fr)
Caractérisation Composé binaire Désorption gaz solide Effet milieu Etude expérimentale Gallium Arséniure Gallium Oxyde Hydrogène Interface gaz solide Rayon X Réaction surface Réduction chimique Semiconducteur Spectrométrie photoélectron Température Thermodésorption As Ga Ga O Ga2O3 Ga2O GaAs H
Keyword (en)
Characterization Binary compound Gas solid desorption Medium effect Experimental study Gallium Arsenides Gallium Oxides Hydrogen Gas solid interface X ray Surface reaction Chemical reduction Semiconductor materials Photoelectron spectrometry Temperature Thermodesorption
Keyword (es)
Caracterización Compuesto binario Desorción gas sólido Efecto medio Estudio experimental Galio Arseniuro Galio Óxido Hidrógeno Interfase gas sólido Rayos X Reacción superficie Reducción química Semiconductor(material) Espectrometría fotoelectrón Temperatura Desabsorción térmica
Classification
Pascal
001 Exact sciences and technology / 001C Chemistry / 001C01 General and physical chemistry / 001C01I Surface physical chemistry / 001C01I04 Solid-gas interface

Discipline
General chemistry and physical chemistry
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
3968031

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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