A planar variable reluctane magnetic micromotor with fully integrated stator and coils
- Author
- AHN, C. H; KIM, Y. J; ALLEN, M. G
Georgia inst. technology, microelectronics res. cent., school electrical eng., Atlanta GA 30332-0269, United States - Source
Journal of microelectromechanical systems. 1993, Vol 2, Num 4, pp 165-173 ; ref : 19 ref
- ISSN
- 1057-7157
- Scientific domain
- Electronics; Mechanics acoustics; Physics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Dispositif magnétique Dépôt électrolytique Gravure plasma Machine réluctance Micromoteur Montage Nickel Fer Alliage Pastille électronique Rotor Silicium Stator Système intégré Usinage Microusinage
- Keyword (en)
- Magnetic device Electroplating Plasma etching Reluctance machine Micromotor Assembling Nickel Iron Alloys Wafer Rotor Silicon Stator Integrated system Machining Micromachining
- Keyword (es)
- Dispositivo magnético Depósito electrolítico Grabado plasma Máquina reluctancia Micromotor Montaje Niquel Hierro Aleación Pastilla electrónica Rotor Silicio Estator Sistema integrado Mecanizado
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Mechanical engineering. Mechanical construction. Handling
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 3979304
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1109/84.273093 
https://dx.doi.org/10.1109/84.273093
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