Identification of volatile products in low pressure hydrocarbon electron cyclotron resonance reactive ion etching of InP and GaAs
- Author
- MELVILLE, D. L; SIMMONS, J. G; THOMPSON, D. A
McMaster univ., cent. electrophotonic materials devices, dep. eng. physics, Hamilton ON L8S 4L7, Canada - Conference title
- ISEIPB : International symposium on electron, ion, and photon beams
- Conference name
- ISEIPB : International symposium on electron, ion, and photon beams (37 ; San Diego CA 1993-06-01)
- Author (monograph)
- American Vacuum Society, New York NY, United States (Funder/Sponsor)
IEEE. Electron Device Society, United States (Funder/Sponsor)
Optical Society of America, Washington DC, United States (Funder/Sponsor) - Source
Journal of vacuum science & technology. B. Microelectronics and nanometer structures. Processing, measurement and phenomena. 1993, Vol 11, Num 6, pp 2038-2045 ; ref : 28 ref
- ISSN
- 1071-1023
- Scientific domain
- Electronics
- Publisher
- American Institute of Physics, Melville, NY
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Argon Composé binaire Effet composition Etude expérimentale Fabrication microélectronique Gallium Arséniure Gravure ionique réactive Hydrocarbure Indium Phosphure Résonance cyclotronique électronique Teneur matière volatile As Ga GaAs In P InP
- Keyword (en)
- Argon Binary compound Composition effect Experimental study Microelectronic fabrication Gallium Arsenides Reactive ion etching Hydrocarbon Indium Phosphides Electron cyclotron resonance Volatile matter content
- Keyword (es)
- Argón Compuesto binario Efecto composición Estudio experimental Fabricación microeléctrica Galio Arseniuro Grabado iónico reactivo Hidrocarburo Indio Fosfuro Resonancia ciclotrónica electrónica Contenido materia volátil
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 3993685
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1116/1.586540 
https://dx.doi.org/10.1116/1.586540
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