Influence of the oxygen incorporation on the stability of Al/TiN/Si structures
- Author
- JIMENEZ, C; FERNANDEZ, M; ALBELLA, J. M; MARTINEZ-DUART, J. M
CSIC, inst. cienc. materiales, 28049 Madrid, Spain - Conference title
- Applications of surface science and electronic materials
- Conference name
- ICV-12 : international vacuum congress (12 ; The Hague 1992-10-12)
- Author (monograph)
- GRASSERBAUER, M (Editor); VAN GORKUM, A. A (Editor); LÜTH, H (Editor); ZALM, P. C (Editor); KLEYN, A. W (Editor)1
Netherland Vacuum Society, Netherlands (Funder/Sponsor)
International Union for Vacuum Science Technique and Applications, International (Funder/Sponsor)
[1] FOM-Inst. atomic molecular physics, Amsterdam, Netherlands - Source
Applied surface science. 1993, Vol 70-71, Num 1-4, pp 475-478 ; B ; ref : 10 ref
- Publisher
- Elsevier Science, Amsterdam
- Publication country
- Netherlands
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- AES Addition oxygène Aluminium Atmosphère contrôlée Barrière Composé binaire Diffusion mutuelle Etude expérimentale Interface solide solide Rayon X Recuit Silicium Spectrométrie photoélectron Titane nitrure Al Si TiN Métal transition composé
- Keyword (en)
- AES Oxygen additions Aluminium Controlled atmospheres Barrier Binary compounds Interdiffusion Experimental study Solid-solid interfaces X radiation Annealing Silicon Photoelectron spectroscopy Titanium nitrides Transition element compounds
- Keyword (es)
- Barrera Difusión mútua
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H35 Solid surfaces and solid-solid interfaces / 001B60H35F Diffusion; interface formation
- Discipline
- Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 3993938
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/0169-4332(93)90564-R 
https://dx.doi.org/10.1016/0169-4332(93)90564-R
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