On the possibility of automating wet' chemical analysis in the rapid control of semiconductor film composition by plan-factor analysis techniques
- Author
- FEDIN, A. V
- Source
Russian chemical industry. 1993, Vol 25, Num 2, pp 52-62 ; ref : 14 ref
- ISSN
- 1068-3704
- Scientific domain
- Chemical engineering
- Publisher
- Allerton Press, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Analyse chimique Automatisation Couche mince Semiconducteur
- Keyword (en)
- Chemical analysis Automation Thin film Semiconductor materials
- Keyword (es)
- Análisis químico Automatización Capa fina Semiconductor(material)
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D07 Chemical engineering / 001D07T Metrology, automation
- Discipline
- Chemical engineering
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 4026147
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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