Structural properties of titanium dioxide films grown on p-Si by metal-organic deposition at low temperature
- Author
- YOON, Y. S1 ; KANG, W. N1 ; YOM, S. S1 ; KIM, T. W; JUNG, M; PARK, T. H; SEO, K. Y; JONG YONG LEE
[1] Korea inst. sci. technology, applied physics lab., Seoul, Korea, Republic of - Source
Thin solid films. 1994, Vol 238, Num 1, pp 12-14 ; ref : 21 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Article
- Language
- English
- Keyword (fr)
- Composé organométallique Couche mince Couche épitaxique Diffraction RX Dépôt chimique phase vapeur Etude expérimentale Interface MET Microstructure Phase amorphe Polycristal Profilage Pyrolyse Spectrométrie Auger Titane oxyde
- Keyword (en)
- Organometallic compounds Thin films Epitaxial layers X-ray diffraction Chemical vapor deposition Experimental study Interfaces TEM Microstructure Amorphous phase Polycrystals Cold roll forming Pyrolysis Auger electron spectroscopy Titanium oxides
- Keyword (es)
- Fase amorfa Perfilación
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55J Structure and morphology; thickness
- Discipline
- Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 4129017
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/0040-6090(94)90640-8 
https://dx.doi.org/10.1016/0040-6090(94)90640-8
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