Optical profilometry and its application to mechanically inaccessible surfaces. I: Principles of focus error detection
- Author
- VISSCHER, M; STRUIK, K. G
Eindhoven univ. technology, dep. mechanical eng., Eindhoven, Netherlands - Source
Precision engineering. 1994, Vol 16, Num 3, pp 192-198 ; ref : 12 ref
- CODEN
- PREGDL
- ISSN
- 0141-6359
- Scientific domain
- Mechanical engineering; Metallurgy, welding
- Publisher
- Elsevier Science, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Couche mince transparente Détection défaut Détection erreur Etat surface Fenêtre Focalisation Foyer(optique) Méthode mesure Méthode optique Plaque Profilométrie Rugosité Verre
- Keyword (en)
- Transparent thin film Defect detection Error detection Surface conditions Windows Focusing Focus Measurement method Optical method Plate Profilometry Roughness Glass
- Keyword (es)
- Película transparente Detección imperfección Detección error Estado superficie Ventana Focalización Foco óptico Método medida Método óptico Placa Perfilometría Rugosidad Vidrio
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12C Industrial metrology. Testing / 001D12C02 Non-destructive testing: methods and equipments
- Discipline
- Mechanical engineering. Mechanical construction. Handling
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 4202740
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/0141-6359(94)90124-4 
https://dx.doi.org/10.1016/0141-6359(94)90124-4
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