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Optical profilometry and its application to mechanically inaccessible surfaces. I: Principles of focus error detection

Author
VISSCHER, M; STRUIK, K. G
Eindhoven univ. technology, dep. mechanical eng., Eindhoven, Netherlands
Source

Precision engineering. 1994, Vol 16, Num 3, pp 192-198 ; ref : 12 ref

CODEN
PREGDL
ISSN
0141-6359
Scientific domain
Mechanical engineering; Metallurgy, welding
Publisher
Elsevier Science, New York, NY
Publication country
United States
Document type
Article
Language
English
Keyword (fr)
Couche mince transparente Détection défaut Détection erreur Etat surface Fenêtre Focalisation Foyer(optique) Méthode mesure Méthode optique Plaque Profilométrie Rugosité Verre
Keyword (en)
Transparent thin film Defect detection Error detection Surface conditions Windows Focusing Focus Measurement method Optical method Plate Profilometry Roughness Glass
Keyword (es)
Película transparente Detección imperfección Detección error Estado superficie Ventana Focalización Foco óptico Método medida Método óptico Placa Perfilometría Rugosidad Vidrio
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12C Industrial metrology. Testing / 001D12C02 Non-destructive testing: methods and equipments

Discipline
Mechanical engineering. Mechanical construction. Handling
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
4202740

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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