Optical properties and stress of ion-assisted aluminum nitride thin films
- Author
- MARTIN, P; NETTERFIELD, R; KINDER, T; BENDAVID, A
CSIRO, div. applied physics, Sydney N.S.W. 2070, Australia - Source
Applied optics. 1992, Vol 31, Num 31, pp 6734-6740 ; ref : 25 ref
- CODEN
- APOPAI
- ISSN
- 0003-6935
- Scientific domain
- Electronics; Optics; Telecommunications
- Publisher
- Optical Society of America, Washington, DC
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Aluminium Nitrure Couche mince Indice réfraction Ion Propriété optique
- Keyword (en)
- Aluminium Nitrides Thin film Refraction index Ions Optical properties
- Keyword (es)
- Aluminio Nitruro Capa fina Indice refracción Ión Propiedad óptica
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
- Discipline
- Physics of condensed state : electronic structure, electrical, magnetic and optical properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 4406177
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1364/AO.31.006734 
https://dx.doi.org/10.1364/AO.31.006734
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