Silicide formation and phase separation from Cu/Nb and Nb/Cu bilayers on silicon
- Author
- MATTOSO FILHO, N1 ; ACHETE, C1 ; FREIRE, F. L
[1] Univ. federal Rio de Janeiro, PEMM-COPPE, Rio de Janeiro, Brazil - Conference title
- International conference on metallurgical coatings and thin films
- Conference name
- International conference on metallurgical coatings and thin films (19 ; San Diego CA 1992-04-06)
- Author (monograph)
- SARTWELL, B. D (Editor)1 ; MCGUIRE, G. E (Editor); HOFMANN, S (Editor)
[1] Max-Planck-Inst. Metallorschung, Inst. Werkstoffwissenschaft, 7000 Stuttgart, Germany - Source
Thin solid films. 1992, Vol 220, Num 1-2, pp 184-190 ; ref : 16 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Couche bimoléculaire Couche mince Cuivre Diffraction RX Diffraction électron Faisceau électronique Interface Microscopie électronique transmission Niobium Recuit Rétrodiffusion Rutherford Spectrométrie Auger Spectrométrie RX Spectrométrie électron Séparation phase Température recuit
- Keyword (en)
- Bilayer Thin film Copper X ray diffraction Electron diffraction Electron beam Interface Transmission electron microscopy Niobium Annealing Rutherford backscattering Auger electron spectrometry X ray spectrometry Electron spectrometry Phase separation Annealing temperature
- Keyword (es)
- Capa bimolecular Capa fina Cobre Difracción RX Difracción electrónica Haz electrónico Interfase Microscopía electrónica transmisión Niobio Recocido Retrodifusión Rutherford Espectrometría Auger Espectrometría RX Espectrometría electrón Separación fase Temperatura recocido
- Keyword (de)
- Duennschicht Kupfer Roentgenbeugung Elektronenbeugung Elektronenstrahl Grenzflaeche Transmissionselektronenmikroskopie Niob Gluehen Rutherford Rueckstreuung Auger Spektrometrie Elektronenspektrometrie Gluehtemperatur
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H35 Solid surfaces and solid-solid interfaces / 001B60H35B Surface structure and topography
- Discipline
- Metals. Metallurgy Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 4486391
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/0040-6090(92)90570-2 
https://dx.doi.org/10.1016/0040-6090(92)90570-2
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