Simulation des trajectoires d'électrons secondaires pour le test des circuits intégrés au microscope électronique à balayage : Numerical modeling of electromagnetic fields
- Other title
- Simulation of secondary electron trajectories for testing the integrated circuits with scanning electron microscope (en)
- Author
- ROCHE, F. M; BARILLE, R
CNRS Univ. Montpellier II, lab. informatique robotique microélectronique Montpellier, 34095 Montpellier, France - Source
Journal de physique. III (Print). 1992, Vol 2, Num 11, pp 2155-2163 ; ref : 12 ref
- ISSN
- 1155-4320
- Scientific domain
- Mechanics acoustics; Condensed state physics; Plasma physics
- Publisher
- Editions de physique, Les Ulis
- Publication country
- France
- Document type
- Article
- Language
- French
- Keyword (fr)
- Circuit intégré Electron secondaire Equation Poisson Essai Etude théorique Faisceau électronique Microscopie électronique balayage Mouvement particule Simulation numérique
- Keyword (en)
- Integrated circuit Secondary electron Poisson equation Test Theoretical study Electron beam Scanning electron microscopy Particle motion Numerical simulation
- Keyword (es)
- Circuito integrado Electrón secundario Ecuación Poisson Ensayo Estudio teórico Haz electrónico Microscopía electrónica barrido Movimiento partícula Simulación numérica
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40A Electromagnetism; electron and ion optics / 001B40A90 Other topics in electromagnetism; electron and ion optics
- Discipline
- Physics : electromagnetism
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 4492656
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1051/jp3:1992237 
https://dx.doi.org/10.1051/jp3:1992237
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