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Fast degradation of boron-doped strained Si(1-x)Gex layers by 1-MeV electron irradiation

Author
VANHELLEMONT, J1 ; TRAUWAERT, M.-A1 ; POORTMANS, J1 ; CAYMAX, M1 ; CLAUWS, P
[1] Interuniv. micro-electronics cent., 3001 Leuven, Belgium
Source

Applied physics letters. 1993, Vol 62, Num 3, pp 309-311 ; ref : 7 ref

CODEN
APPLAB
ISSN
0003-6951
Scientific domain
Crystallography; Electronics; Optics; Condensed state physics
Publisher
American Institute of Physics, Melville, NY
Publication country
United States
Document type
Article
Language
English
Keyword (fr)
Basse température Bore Capacité électrique Caractéristique capacité tension Caractéristique courant tension Composition chimique Composé minéral Courant fuite Electron Etude expérimentale Fluence Germanium Impureté Interaction défaut cristallin Irradiation Jonction p n Niveau défaut Niveau peu profond Phénomène transport Piégeage porteur charge Semiconducteur Silicium Température Trou
Keyword (en)
Low temperature Boron Capacitance Voltage capacity curve Voltage current curve Chemical composition Inorganic compound Leakage current Electrons Experimental study Fluence Germanium Impurity Crystal defect interaction Irradiation p n junction Defect level Shallow level Transport process Charge carrier trapping Semiconductor materials Silicon Temperature Hole
Keyword (es)
Baja temperatura Boro Capacitancia Característica capacidad tensión Característica corriente tensión Composición química Compuesto inorgánico Corriente escape Electrón Estudio experimental Fluencia Germanio Impureza Interacción defecto cristalino Irradiación Unión p n Nivel poco profundo Fenómeno transporte Captura portador carga Semiconductor(material) Silicio Temperatura Hoyo
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70C Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures / 001B70C40 Electronic transport in interface structures

Discipline
Physics of condensed state : electronic structure, electrical, magnetic and optical properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
4498063

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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