Heavy doping effects in the diffusion of group IV and V impurities in silicon
- Author
- LARSEN, A. N1 ; LARSEN, K. K1 ; ANDERSEN, P. E1 ; SVENSSON, B. G
[1] Univ. Aarhus, inst. physics astronomy, 8000 Aarhus, Denmark - Source
Journal of applied physics. 1993, Vol 73, Num 2, pp 691-698 ; ref : 25 ref
- CODEN
- JAPIAU
- ISSN
- 0021-8979
- Scientific domain
- Crystallography; Electronics; Optics; Condensed state physics; Physics
- Publisher
- American Institute of Physics, Woodbury, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Antimoine Arsenic Bore Codopage Coefficient diffusion Concentration impureté Densité lacune Energie liaison Etain Etude expérimentale Etude théorique Germanium Hétérodiffusion Implantation ion Impureté substitutionnelle Lacune Mouvement lacune Paire lacune impureté Percolation Phosphore Recuit thermique rapide Rétrodiffusion Rutherford Semiconducteur Silicium Spectrométrie SIMS Température
- Keyword (en)
- Antimony Arsenic Boron Codoping Diffusion coefficient Impurity density Vacancy density Binding energy Tin Experimental study Theoretical study Germanium Impurity diffusion Ion implantation Substitutional impurities Vacancy Vacancy motion Vacancy impurity pair Percolation Phosphorus Rapid thermal annealing Rutherford backscattering Semiconductor materials Silicon Secondary ion mass spectrometry Temperature
- Keyword (es)
- Antimonio Arsénico Boro Codrogado Coeficiente difusión Concentración impureza Densidad vacuidad Energía enlace Estaño Estudio experimental Estudio teórico Germanio Heterodifusión Implantación ión Impureza substitucional Cavidad Movimiento vacuidad Par laguna impureza Percolación Fósforo Recocido térmico rápido Retrodifusión Rutherford Semiconductor(material) Silicio Espectrometría SIMS Temperatura
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60F Transport properties of condensed matter (nonelectronic) / 001B60F30 Diffusion in solids / 001B60F30J Diffusion of impurities
- Discipline
- Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 4526246
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1063/1.353324 
https://dx.doi.org/10.1063/1.353324
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