Diffusion of P in a novel three-dimensional device based on Si-TaSi2 eutectic
- Author
- PELLEG, J; DITCHEK, B. M
GTE Laboratories, Waltham MA 02554, United States - Source
Journal of applied physics. 1993, Vol 73, Num 2, pp 699-706 ; ref : 74 ref
- CODEN
- JAPIAU
- ISSN
- 0021-8979
- Scientific domain
- Crystallography; Electronics; Optics; Condensed state physics; Physics
- Publisher
- American Institute of Physics, Woodbury, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Coefficient diffusion Composé minéral Dislocation Distribution concentration Energie activation Equation Arrhenius Etude expérimentale Haute température Hétérodiffusion Monocristal Phosphore Recuit thermique rapide Semiconducteur Silicium Spectrométrie SIMS Structure eutectique Tantale Siliciure Température Métal transition Composé
- Keyword (en)
- Diffusion coefficient Inorganic compound Dislocation Concentration distribution Activation energy Arrhenius equation Experimental study High temperature Impurity diffusion Single crystal Phosphorus Rapid thermal annealing Semiconductor materials Silicon Secondary ion mass spectrometry Eutectic structure Tantalum Silicides Temperature Transition metal Compounds
- Keyword (es)
- Coeficiente difusión Compuesto inorgánico Dislocación Distribución concentración Energía activación Ecuación Arrenio Estudio experimental Alta temperatura Heterodifusión Monocristal Fósforo Recocido térmico rápido Semiconductor(material) Silicio Espectrometría SIMS Estructura eutéctica Tantalio Siliciuro Temperatura Metal transición Compuesto
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60F Transport properties of condensed matter (nonelectronic) / 001B60F30 Diffusion in solids / 001B60F30J Diffusion of impurities
- Discipline
- Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 4526247
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1063/1.353325 
https://dx.doi.org/10.1063/1.353325
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