On equithickness of coatings deposited by radiofrequency magnetron sputtering
- Author
- KOBA, V. I; LUNEV, I. V; PADALKA, V. G
- Source
Fizika i himiâ obrabotki materialov. 1992, Num 2, pp 95-98 ; ref : 8 ref
- CODEN
- FKOMAT
- ISSN
- 0015-3214
- Scientific domain
- General chemistry, physical chemistry; Metallurgy, welding; Polymers, paint and wood industries
- Publisher
- Nauka, Moskva
- Publication country
- Russian Federation
- Document type
- Article
- Language
- Russian
- Keyword (fr)
- Dépôt plasma Etude théorique Magnétron Pulvérisation haute fréquence Pulvérisation irradiation Pulvérisation réactive Revêtement
- Keyword (en)
- Plasma deposition Theoretical study Magnetron Radiofrequency sputtering Sputtering Reactive sputtering Coatings
- Keyword (es)
- Depósito plasma Estudio teórico Magnetrón Pulverización alta frecuencia Pulverización irradiación Pulverización reactiva Revestimiento
- Keyword (de)
- Theoretische Untersuchung Sputtern Ueberzug
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering
- Discipline
- Metals. Metallurgy Physics and materials science
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 4659593
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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"O:13:\"PanistOpenUrl\":36:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000idc\";N;s:6:\"\u0000*\u0000fmt\";s:7:\"journal\";s:6:\"\u0000*\u0000doi\";s:0:\"\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:77:\"On equithickness of coatings deposited by radiofrequency magnetron sputtering\";s:9:\"\u0000*\u0000jtitle\";s:36:\"Fizika i himi\u00e2 obrabotki materialov\";s:9:\"\u0000*\u0000stitle\";s:24:\"Fiz. i him. obrab. mater\";s:7:\"\u0000*\u0000date\";s:4:\"1992\";s:9:\"\u0000*\u0000volume\";s:0:\"\";s:8:\"\u0000*\u0000issue\";s:1:\"2\";s:8:\"\u0000*\u0000spage\";s:2:\"95\";s:8:\"\u0000*\u0000epage\";s:2:\"98\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0015-3214\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:4:\"KOBA\";s:10:\"\u0000*\u0000aufirst\";s:4:\"V. I\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:2:{i:0;s:11:\"LUNEV, I. V\";i:1;s:13:\"PADALKA, V. G\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:0:\"\";s:8:\"\u0000*\u0000coden\";s:6:\"FKOMAT\";s:8:\"\u0000*\u0000genre\";s:7:\"article\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:0:\"\";s:8:\"\u0000*\u0000title\";s:77:\"On equithickness of coatings deposited by radiofrequency magnetron sputtering\";s:8:\"\u0000*\u0000place\";s:6:\"Moskva\";s:6:\"\u0000*\u0000pub\";s:5:\"Nauka\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:0:\"\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Panist access
"O:12:\"IstexOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:7:\"journal\";s:6:\"\u0000*\u0000doi\";s:0:\"\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:77:\"On equithickness of coatings deposited by radiofrequency magnetron sputtering\";s:9:\"\u0000*\u0000jtitle\";s:36:\"Fizika i himi\u00e2 obrabotki materialov\";s:9:\"\u0000*\u0000stitle\";s:24:\"Fiz. i him. obrab. mater\";s:7:\"\u0000*\u0000date\";s:4:\"1992\";s:9:\"\u0000*\u0000volume\";s:0:\"\";s:8:\"\u0000*\u0000issue\";s:1:\"2\";s:8:\"\u0000*\u0000spage\";s:2:\"95\";s:8:\"\u0000*\u0000epage\";s:2:\"98\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0015-3214\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:4:\"KOBA\";s:10:\"\u0000*\u0000aufirst\";s:4:\"V. I\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:2:{i:0;s:11:\"LUNEV, I. V\";i:1;s:13:\"PADALKA, V. G\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:0:\"\";s:8:\"\u0000*\u0000coden\";s:6:\"FKOMAT\";s:8:\"\u0000*\u0000genre\";s:7:\"article\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:0:\"\";s:8:\"\u0000*\u0000title\";s:77:\"On equithickness of coatings deposited by radiofrequency magnetron sputtering\";s:8:\"\u0000*\u0000place\";s:6:\"Moskva\";s:6:\"\u0000*\u0000pub\";s:5:\"Nauka\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:0:\"\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Istex access
"O:16:\"EuropePMCOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:7:\"journal\";s:6:\"\u0000*\u0000doi\";s:0:\"\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:77:\"On equithickness of coatings deposited by radiofrequency magnetron sputtering\";s:9:\"\u0000*\u0000jtitle\";s:36:\"Fizika i himi\u00e2 obrabotki materialov\";s:9:\"\u0000*\u0000stitle\";s:24:\"Fiz. i him. obrab. mater\";s:7:\"\u0000*\u0000date\";s:4:\"1992\";s:9:\"\u0000*\u0000volume\";s:0:\"\";s:8:\"\u0000*\u0000issue\";s:1:\"2\";s:8:\"\u0000*\u0000spage\";s:2:\"95\";s:8:\"\u0000*\u0000epage\";s:2:\"98\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0015-3214\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:4:\"KOBA\";s:10:\"\u0000*\u0000aufirst\";s:4:\"V. I\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:2:{i:0;s:11:\"LUNEV, I. V\";i:1;s:13:\"PADALKA, V. G\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:0:\"\";s:8:\"\u0000*\u0000coden\";s:6:\"FKOMAT\";s:8:\"\u0000*\u0000genre\";s:7:\"article\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:0:\"\";s:8:\"\u0000*\u0000title\";s:77:\"On equithickness of coatings deposited by radiofrequency magnetron sputtering\";s:8:\"\u0000*\u0000place\";s:6:\"Moskva\";s:6:\"\u0000*\u0000pub\";s:5:\"Nauka\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:0:\"\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Europe PubMed Central access
"O:11:\"BaseOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:7:\"journal\";s:6:\"\u0000*\u0000doi\";s:0:\"\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:77:\"On equithickness of coatings deposited by radiofrequency magnetron sputtering\";s:9:\"\u0000*\u0000jtitle\";s:36:\"Fizika i himi\u00e2 obrabotki materialov\";s:9:\"\u0000*\u0000stitle\";s:24:\"Fiz. i him. obrab. mater\";s:7:\"\u0000*\u0000date\";s:4:\"1992\";s:9:\"\u0000*\u0000volume\";s:0:\"\";s:8:\"\u0000*\u0000issue\";s:1:\"2\";s:8:\"\u0000*\u0000spage\";s:2:\"95\";s:8:\"\u0000*\u0000epage\";s:2:\"98\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0015-3214\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:4:\"KOBA\";s:10:\"\u0000*\u0000aufirst\";s:4:\"V. I\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:2:{i:0;s:11:\"LUNEV, I. V\";i:1;s:13:\"PADALKA, V. G\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:0:\"\";s:8:\"\u0000*\u0000coden\";s:6:\"FKOMAT\";s:8:\"\u0000*\u0000genre\";s:7:\"article\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:0:\"\";s:8:\"\u0000*\u0000title\";s:77:\"On equithickness of coatings deposited by radiofrequency magnetron sputtering\";s:8:\"\u0000*\u0000place\";s:6:\"Moskva\";s:6:\"\u0000*\u0000pub\";s:5:\"Nauka\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:0:\"\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Base Search access
"O:12:\"ArXivOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:7:\"journal\";s:6:\"\u0000*\u0000doi\";s:0:\"\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:77:\"On equithickness of coatings deposited by radiofrequency magnetron sputtering\";s:9:\"\u0000*\u0000jtitle\";s:36:\"Fizika i himi\u00e2 obrabotki materialov\";s:9:\"\u0000*\u0000stitle\";s:24:\"Fiz. i him. obrab. mater\";s:7:\"\u0000*\u0000date\";s:4:\"1992\";s:9:\"\u0000*\u0000volume\";s:0:\"\";s:8:\"\u0000*\u0000issue\";s:1:\"2\";s:8:\"\u0000*\u0000spage\";s:2:\"95\";s:8:\"\u0000*\u0000epage\";s:2:\"98\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0015-3214\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:4:\"KOBA\";s:10:\"\u0000*\u0000aufirst\";s:4:\"V. I\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:2:{i:0;s:11:\"LUNEV, I. V\";i:1;s:13:\"PADALKA, V. G\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:0:\"\";s:8:\"\u0000*\u0000coden\";s:6:\"FKOMAT\";s:8:\"\u0000*\u0000genre\";s:7:\"article\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:0:\"\";s:8:\"\u0000*\u0000title\";s:77:\"On equithickness of coatings deposited by radiofrequency magnetron sputtering\";s:8:\"\u0000*\u0000place\";s:6:\"Moskva\";s:6:\"\u0000*\u0000pub\";s:5:\"Nauka\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:0:\"\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
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