Preparation and microstructure of reactively sputtered Ti1-xZrxN films
- Author
- SAKAMOTO, I; MARUNO, S; JIN, P
Nagoya inst. technology, Showa-ku, Nagoya 466, Japan - Conference title
- Thin films
- Conference name
- IVC-12 : international vacuum congress (12 ; The Hague 1992-10-12)
- Author (monograph)
- HOFMANN, S (Editor)1 ; ROCKETT, A (Editor); KLEYN, AART W (Editor)
Netherlands Vacuum Society, Netherlands (Funder/Sponsor)
International Union for Vacuum Science, Techniques and Applications, International (Funder/Sponsor)
[1] Max-Planck-Inst. Metallforschung, Inst. Werkstoffwiss., W-7000 Stuttgart, Germany - Source
Thin solid films. 1993, Vol 228, Num 1-2, pp 169-172 ; ref : 9 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Composition chimique Composé minéral Couche mince Diffraction RX Diffraction électron Microscopie Auger Microscopie électronique balayage Microscopie électronique émission champ Microstructure Préparation Pulvérisation réactive Sonde électronique Spectrométrie Auger Titane Zirconium Nitrure Mixte
- Keyword (en)
- Chemical composition Inorganic compound Thin film X ray diffraction Electron diffraction Auger microscopy Scanning electron microscopy Field electron microscopy Microstructure Preparation Reactive sputtering Electron probe Auger electron spectrometry Titanium Zirconium Nitrides Mixed
- Keyword (es)
- Composición química Compuesto inorgánico Capa fina Difracción RX Difracción electrónica Microscopía Auger Microscopía electrónica barrido Microscopía electrónica emisión campo Microestructura Preparación Pulverización reactiva Sonda electrónica Espectrometría Auger Titanio Zirconio Nitruro Mixto
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H35 Solid surfaces and solid-solid interfaces / 001B60H35J Surface and interface dynamics and vibrations
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology
- Discipline
- Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 4758746
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/0040-6090(93)90590-L 
https://dx.doi.org/10.1016/0040-6090(93)90590-L
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