High-resolution focused ion beams
- Author
- ORLOFF, J
Oregon graduate inst., dep. electrical eng. applied physics, Beaverton OR 97006, United States - Source
Review of scientific instruments. 1993, Vol 64, Num 5, pp 1105-1130 ; ref : 214 ref
- CODEN
- RSINAK
- ISSN
- 0034-6748
- Scientific domain
- Electronics; Physics
- Publisher
- American Institute of Physics, Woodbury, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Application Article synthèse Faisceau ionique Focalisation Laser solide Optique ionique Source ion Usinage Faisceau ion focalisé Microusinage
- Keyword (en)
- Application Review Ion beam Focusing Solid state laser Ion optics Ion source Machining Focused ion beam
- Keyword (es)
- Aplicación Artículo síntesis Haz iónico Focalización Laser sólido Optica iónica Fuente ión Mecanizado
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40A Electromagnetism; electron and ion optics / 001B40A75 Charged-particle beams
- Discipline
- Physics : electromagnetism
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 4838008
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1063/1.1144104 
https://dx.doi.org/10.1063/1.1144104
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