Variation de la contrainte des verres de silice sous cycle thermique
- Author
- BOUCHARD, H1 ; AZELMAD, A; CURRIE, J. F; MEUNIER, M
[1] Ecole polytech., dép. génie physique, groupe couches minces, Montréal PQ H3C 3A7, Canada - Conference title
- Canadian semiconductor technology conference
- Conference name
- Canadian semiconductor technology conferenceConférence canadienne sur la technologie des semiconducteurs (6 ; Ottawa ON 1992-08-11)
- Author (monograph)
- BARIBEAU, Jean-Marc (Editor)
- Source
Canadian journal of physics (Print). = Revue canadienne de physique. 1992, Vol 70, Num 10-11, pp 830-833 ; ref : 12 ref
- CODEN
- CJPHAD
- ISSN
- 0008-4204
- Scientific domain
- Optics; Atomic molecular physics; Condensed state physics; Physics
- Publisher
- National Research Council of Canada, Ottawa
- Publication country
- Canada
- Document type
- Conference Paper
- Language
- French
- Keyword (fr)
- Bore Composé minéral Concentration impureté Contrainte mécanique Dopage Etude expérimentale Phosphosilicate Recuit thermique Silicium Oxyde Verre Viscosité
- Keyword (en)
- Boron Inorganic compound Impurity density Mechanical stress Doping Experimental study Phosphosilicates Thermal annealing Silicon Oxides Glass Viscosity
- Keyword (es)
- Boro Compuesto inorgánico Concentración impureza Tensión mecánica Doping Estudio experimental Fosfosilicato Recocido térmico Silicio Óxido Vidrio Viscosidad
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60B Mechanical and acoustical properties of condensed matter / 001B60B20 Mechanical properties of solids / 001B60B20H Creep
- Discipline
- Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 4912227
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1139/p92-131 
https://dx.doi.org/10.1139/p92-131
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