Optical and microstructural properties of hafnium dioxide thin films
- Author
- LEHAN, J. P; MAO, Y; BOVARD, B. G; MACLEOD, H. A
Univ. Arizona, optical sci. cent., Tucson AZ 85721, United States - Source
Thin solid films. 1991, Vol 203, Num 2, pp 227-250 ; ref : 44 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Article
- Language
- English
- Keyword (fr)
- Composé minéral Couche mince Diffraction électron Etude expérimentale Hafnium Oxyde Indice réfraction Microscopie électronique balayage Microscopie électronique transmission Microstructure Propriété optique Rétrodiffusion Rutherford Spectrométrie photoélectron
- Keyword (en)
- Inorganic compound Thin film Electron diffraction Experimental study Hafnium Oxides Refraction index Scanning electron microscopy Transmission electron microscopy Microstructure Optical properties Rutherford backscattering Photoelectron spectrometry
- Keyword (es)
- Compuesto inorgánico Capa fina Difracción electrónica Estudio experimental Hafnio Óxido Indice refracción Microscopía electrónica barrido Microscopía electrónica transmisión Microestructura Propiedad óptica Retrodifusión Rutherford Espectrometría fotoelectrón
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation / 001B70H66 Optical properties of specific thin films
- Discipline
- Physics of condensed state : electronic structure, electrical, magnetic and optical properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 4980335
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/0040-6090(91)90131-G 
https://dx.doi.org/10.1016/0040-6090(91)90131-G
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