Optical emission diagnostics of laser-induced plasma for diamond-like film deposition
- Author
- CHEN, X; MAZUMDER, J; PUROHIT, A
Univ. Illinois at Urbana-Champaign, laser-aided materials processing lab., Urbana IL 61801, United States - Source
Applied physics. A, Solids and surfaces. 1991, Vol 52, Num 5, pp 328-334 ; ref : 41 ref
- CODEN
- APSFDB
- ISSN
- 0721-7250
- Scientific domain
- Electronics; Condensed state physics
- Publisher
- Springer, Berlin
/
Springer, Heidelberg
/
Springer, New York, NY
- Publication country
- Germany
- Document type
- Article
- Language
- English
- Keyword (fr)
- Argon Atome Carbone Cible solide Couche mince Diamant Dépôt plasma Etude expérimentale Excimère Hydrogène Molécule Laser gaz Mélange gaz Plasma produit par laser Spectrométrie optique Spectrométrie émission
- Keyword (en)
- Argon Atoms Carbon Solid target Thin film Diamond Plasma deposition Experimental study Excimer Hydrogen Molecules Gas laser Gas mixture Laser produced plasma Optical spectrometry Emission spectrometry
- Keyword (es)
- Argón Atomo Carbono Blanco sólido Capa fina Diamante Depósito plasma Estudio experimental Excímero Hidrógeno Molécula Laser gas Mezcla gas Plasma producido por laser Espectrometría óptica Espectrometría emisión
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B75 Plasma devices
- Discipline
- Physics of gases, plasmas and electric discharges
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 4989697
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1007/BF00324774 
https://dx.doi.org/10.1007/BF00324774
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