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Oxygen and fluorine atom kinetics in electron cycloton resonance plasmas by time-resolved actinometry

Author
BOOTH, J. P1 ; SADEGHI, N2
[1] CNS-CNET, lab. physique chimie procédés plasma, Meylan 38243, France
[2] Univ. Joseph Fourier-Grenoble I, lab. spectrométrie physique, Saint Martin d'Hères 38402, France
Source

Journal of applied physics. 1991, Vol 70, Num 2, pp 611-620 ; ref : 25 ref

CODEN
JAPIAU
ISSN
0021-8979
Scientific domain
Crystallography; Electronics; Optics; Condensed state physics; Physics
Publisher
American Institute of Physics, Woodbury, NY
Publication country
United States
Document type
Article
Language
English
Keyword (fr)
Actinométrie Cinétique Etude expérimentale Fluor Molécule Gravure plasma Mélange binaire Mélange gaz Oxygène Molécule Pastille électronique Polymère Réacteur plasma Résolution temporelle Résonance cyclotronique électronique Soufre hexafluorure
Keyword (en)
Actinometry Kinetics Experimental study Fluorine Molecules Plasma etching Binary mixture Gas mixture Oxygen Molecules Wafer Polymer Plasma reactor Time resolution Electron cyclotron resonance Sulfur hexafluoride
Keyword (es)
Actinometría Cinética Estudio experimental Fluor Molécula Grabado plasma Mezcla binaria Mezcla gas Oxígeno Molécula Pastilla electrónica Polímero Reactor plasma Resolución temporal Resonancia ciclotrónica electrónica Persulfurano(hexafluoro)
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B75 Plasma devices

Discipline
Physics of gases, plasmas and electric discharges
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
4989834

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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