ZnO thin fillms prepared by ion-assisted deposition method
- Author
- MIYAMOTO, K1 ; YOSHIDA, M; TOYOTAMA, H; ONARI, S; ARAI, T
[1] Stanley Electric Co. Ltd., Tsukuba res. lab., Tsukuba Ibaraki 300-26, Japan - Source
Japanese journal of applied physics. 1991, Vol 30, Num 8, pp 1830-1835 ; 1 ; ref : 22 ref
- CODEN
- JJAPA5
- ISSN
- 0021-4922
- Scientific domain
- Crystallography; Optics; Condensed state physics; Physics; Plasma physics
- Publisher
- Japanese journal of applied physics, Tokyo
- Publication country
- Japan
- Document type
- Article
- Language
- English
- Keyword (fr)
- Composé minéral Conductivité électrique Couche mince Croissance cristalline Etude expérimentale Faisceau ionique Irradiation Plasma Propriété optique Support Zinc Oxyde Support verre Argon Ion atomique Métal transition Composé
- Keyword (en)
- Inorganic compound Electrical conductivity Thin film Crystal growth Experimental study Ion beam Irradiation Plasma Optical properties Support Zinc Oxides Argon Atomic ions Transition metal Compounds
- Keyword (es)
- Compuesto inorgánico Conductividad eléctrica Capa fina Crecimiento cristalino Estudio experimental Haz iónico Irradiación Plasma Propiedad óptica Soporte Zinc Óxido Argón Ión atómico Metal transición Compuesto
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H35 Solid surfaces and solid-solid interfaces / 001B60H35J Surface and interface dynamics and vibrations
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology
- Discipline
- Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 5022213
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1143/JJAP.30.1830 
https://dx.doi.org/10.1143/JJAP.30.1830
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