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Herstellung klassischer Reinraumprodukte, zu denen Megachips gehören

Other title
The manufacture of traditional clean-room products including megachips (en)
Author
HILBERS, H
Source

Klima, Kälte, Heizung. 1992, Vol 20, Num 1-2, pp 13-18 ; ref : 16 ref

CODEN
KKHEDS
ISSN
0172-1984
Scientific domain
Energy; Civil engineering
Publisher
Müller, Karlsruhe
Publication country
Germany
Document type
Article
Language
German
Keyword (fr)
Conception Contamination Industrie électronique Maintenance Méthode mesure Poste travail Salle blanche Système commande
Keyword (en)
Design Contamination Electronics industry Maintenance Measurement method Workplace layout Clean room Control system
Keyword (es)
Diseño Contaminación Industria electrónica Mantenimiento Método medida Puesto trabajo Sala blanca Sistema control
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D06 Energy / 001D06D Energy. Thermal use of fuels / 001D06D08 Heating, air conditioning and ventilation / 001D06D08D Air conditioning. Ventilation / 001D06D08D4 Air conditioning systems

Discipline
Energy
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
5066575

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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