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Use of atomic layer epitaxy buffer for the growth of InSb on GaAs by molecular beam epitaxy

Author
THOMPSON, P. E; DAVIS, J. L; WATERMAN, J; WAGNER, R. J; GAMMON, D; GASKILL, D. K; STAHLBUSH, R
Naval res. lab., Washington DC 20375-5000, United States
Source

Journal of applied physics. 1991, Vol 69, Num 10, pp 7166-7172 ; ref : 27 ref

CODEN
JAPIAU
ISSN
0021-8979
Scientific domain
Crystallography; Electronics; Optics; Condensed state physics; Physics
Publisher
American Institute of Physics, Woodbury, NY
Publication country
United States
Document type
Article
Language
English
Keyword (fr)
Caractérisation Composé minéral Condensation faisceau moléculaire Couche tampon Croissance cristalline Diagramme rotation Diffraction RX Epaisseur Epitaxie Etude expérimentale Indium Antimoniure Méthode couche atomique Semiconducteur Support Technologie MESA Température Support GaAs
Keyword (en)
Characterization Inorganic compound Molecular beam condensation Buffer layer Crystal growth Rocking curve X ray diffraction Thickness Epitaxy Experimental study Indium Antimonides Atomic layer method Semiconductor materials Support MESA technology Temperature
Keyword (es)
Caracterización Compuesto inorgánico Condensación haz molecular Capa tampón Crecimiento cristalino Diagrama rotación Difracción RX Espesor Epitaxia Estudio experimental Indio Antimoniuro Método capa atómica Semiconductor(material) Soporte Tecnología MESA Temperatura
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H35 Solid surfaces and solid-solid interfaces / 001B60H35J Surface and interface dynamics and vibrations

Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology

Discipline
Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
5073673

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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